Products & Services
ARTIC TEMPERATURE CHUCK
The Artic TC series of temperature controlled chucks are used for test and characterization and failure analysis of semiconductor wafers and other components at hot and cold temperatures.
Each system comprises a temperature controlled chuck and sophisticated PID controller. Model TC2000 is provided with a cooler / heat exchanger for operation at temperatures below ambient. Models TC6000 and TC8000 are supplied with a self contained chiller.
Precision Temperature Control
Chucks are available in 4, 6 and 8 inches diameters to accommodate wafers of different sizes. The Chuck surface is gold plated and has independent vacuum lines for holding the wafers.
The ARTIC Temperature Chucks have many advanced design features which ensure excellent thermal, electrical and mechanical performance with high reliability.
Mechanical interface kits and dedicated configurations are available to adapt the ARTIC Temperature Chucks to most probing stations.
Wide Temperature Range
Chucks which operate over other temperature ranges are also available for special applications.
Temperature Chuck Weights and Dimensions
Power Requirements , System Weights and Dimension
*Specifications may change without notice
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